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. 2020 Feb 20;11(2):214. doi: 10.3390/mi11020214

Figure 3.

Figure 3

Various configurations of electrostatic actuation: (a) Parallel-plate structure (out-of-plane motion and in-plane motion); (b) transverse motion comb structure; (c) longitudinal motion comb structure; (d) out-of-plane motion comb structure.