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An electrostatic actuator for Lamellar grating based FTS: (a) FTS structure schematic: (1) Fixed fingers, (2) Movable fingers, (3) Rigid backbone, (4) Folded flexures; (b) fabricated MEMS device; (c) packaged device; (d) closed-up view of the serpentine flexure. (Reprinted with permission from References [39,40] IOP Publishing, Ltd.).
