Table 1.
Planar IDE capacitor layout description.
| Parameter | Layout 1 | Layout 2 |
|---|---|---|
| W (µm) | 200 | 115 |
| i (µm) | 200 | 225 |
| S (µm) | 250 | 250 |
| L (mm) | 4.6 | 4.55 |
| 2 × N | 12 | 14 |
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