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. 2020 Feb 7;11(2):172. doi: 10.3390/mi11020172

Figure 3.

Figure 3

Two types of schematic diagrams of electrochemical actuated microvalves. (a) A microvalve based on electrochemically actuated SU8 cantilever [37]; (b) A microfluidic valve based on electrochemical (ECM) actuated membrane [39].