Table 2. Average Empirical Formula and Hydrogenation Degree (H/(Ge + N) Atomic Ratio) of the Solids Obtained by X-ray Irradiation, with 100 kGy, of the GeH4/NF3 Mixtures with Different Compositions.
NF3 percentage | 30% | 50% | 70% |
---|---|---|---|
empirical formula | Ge4.35N1F1.676H7.47 | Ge 3.77N1F1.45H6.31 | Ge 3.29N1F1.57H5.06 |
H/(Ge + N) atomic ratio | 1.40 | 1.32 | 1.18 |