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. 2020 Mar 3;5(10):4907–4914. doi: 10.1021/acsomega.9b03729

Table 3. μ-Moles of GeH3NF2 and GeH3F Obtained from X-ray Irradiation of GeH4/NF3 Mixtures for Different GeH4/NF3 Partial Pressures and for Different Irradiation Dosesa.

  GeH4/NF3
mixture (Torr) 490/210
 350/350
 210/490
dose (kGy) 100 200 100 200 100 200
GeH3F 97.0 143.0 62.0 105.0 34.0 88.0
GeH3NF2 20.2 23.0 18.0 18.0 13.0 19.0
GeH3F/GeH3NF2 4.8 6.22 3.44 5.83 2.62 4.63
a

μ-mole determinations are affected by errors of about ±15%; 1.0 Torr = 1.91 × 10–2 mmol.