. 2020 Mar 3;5(10):4907–4914. doi: 10.1021/acsomega.9b03729

Table 4. μ-Moles of GeH₃NF₂ and GeH₃F Obtained from X-ray Irradiation of GeH₄/NF₃ Mixtures with a NF₃ Pressure of 400 Torr and Different GeH₄ Partial Pressures, with an Irradiation Dose of 10 kGy^a^,^b.

The results obtained by adding O₂ as a radical scavenger are also shown.

μ-mole determinations are affected by errors of about ±15%; 1.0 Torr = 1.91 × 10^–2 mmol.

Table 4. μ-Moles of GeH3NF2 and GeH3F Obtained from X-ray Irradiation of GeH4/NF3 Mixtures with a NF3 Pressure of 400 Torr and Different GeH4 Partial Pressures, with an Irradiation Dose of 10 kGya,b.