Table 2.

Constants used to define $\mathsf{\beta }$-phase PVDF flexible film bulk acoustic resonator (FBAR) in COMSOL.

Parameter	Value
$\mathit{Y}$	$3\times {10}^9\mathrm{N}/{\mathrm{m}}^2$
$\mathit{\sigma }$	0.4
$\mathit{\rho }$	$1.78\mathrm{g}/{\mathrm{cm}}^3$
${\mathit{d}}_{31}$	$18 \times {10}^{-12}\mathrm{C}/\mathrm{N}$
${\mathit{d}}_{32}$	$5 \times {10}^{-12}$ $\mathrm{C}/\mathrm{N}$
${\mathit{d}}_{33}$	$-26 \times {10}^{-12}$ $\mathrm{C}/\mathrm{N}$
$\mathit{\epsilon }/{\mathit{\epsilon }}_0$	9.5
$\mathit{t}\mathit{a}\mathit{n}{\mathit{\delta }}_{\mathit{e}}$	0.02