Extended Data Table 1. Design parameters for Fourier surfaces.
Design parameters for all Fourier surfaces demonstrated in this work. The functions are defined for the design to be patterned in the polymer surface, where x and y lie in plane and z is perpendicular (pointing away from the substrate). A right-handed coordinate system is used with the origin placed in the middle of the pattern in both the x and y directions. In these formulas, the height of the surface is defined relative to the unpatterned flat surface where z = 0. All At and ฮi (๐ฌi) have been rounded to the nearest 0.1 (1.0) nm. Analysis of the measured topographies for templated Ag gratings shows that the ๐ฌi are consistently ~2% larger than the design value (Extended Data Fig. 2), attributed to a distance miscalibration in the thermal scanning probe. See Methods.
| Parameters | Height profile | |||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Figure | A 1 (nm) | A 2 (nm) | A 3 (nm) | ๐ฌ 1 (nm) | ๐ฌ 2 (nm) | ๐ฌ 3 (nm) | ฯ 1 (nm) | ฯ 2 (nm) | ฯ 3 (nm) | ฮ (nm) | f(x) | |
| Fig. 1a | 25.0 | โ | โ | 600 | โ | โ | 180 | โ | โ | 35.0 | ||
| Fig. 1d | 18.1 | 14.3 | โ | 600 | 475 | โ | 0 | 0 | โ | 42.3 | ||
| Fig. 1g | 18.4 | 7.0 | 6.4 | 600 | 230 | 210 | 0 | 0 | 0 | 41.8 | ||
| ED Fig. 5 | 19.3 | 9.6 | โ | 620 | 310 | โ | 180 | 180 | โ | 24.4 | ||
| 0 | 38.9 | |||||||||||
| ED Fig. 6 | 18.5 | 0 to 25.1 | โ | 620 | 230 | โ | 0 | 0 | โ | 28.0 to 53.1 | ||
| Fig. 4b | 12.0 | 12.0 | 12.0 | 620 | 520 | 445 | 0 | 0 | 0 | 45.9 | ||
| ED Fig.8a,e | 100 | - | - | 1000 | - | - | 180 | - | - | 110 | ||
| ED Fig.8c | 88.6 | 44.3 | - | 800 | 400 | - | 90 | 90 | - | 125 | ||
| ED Fig.8g | 88.6 | 44.3 | - | 900 | 450 | - | 90 | 90 | - | 125 | ||
| ED Fig.9b | 25.0 | โ | โ | 400 | โ | โ | 180 | โ | โ | 35.0 | ||
| ED Fig.9d | 14.1 | 11.8 | 10.1 | 414 | 347 | 297 | 0 | 0 | 0 | 45.8 | ||
| Figure | i | Ai (nm) | ๐ฌi (nm) | ฯi (deg) | ฮธ 1,7 (deg) | ฮธ 2,8 (deg) | ฮธ 3,9 (deg) | ฮธ 4,10 (deg) | ฮธ 5,11 (deg) | ฮธ 6,12 (deg) | ฮ (nm) | f(x,y) |
| Fig. 2a | 1,2 | 17.5 | 600 | 0 | 0 | -10 | โ | โ | โ | โ | 45.0 | |
| Fig. 2b | 1,2 | 17.5 | 600 | 0 | 0 | -40 | โ | โ | โ | โ | 45.0 | |
| Fig. 3a | 1,2,3 | 15.6 | 600 | 0 | 0 | 60 | 120 | โ | โ | โ | 56.7 | |
| Fig. 3d | 1-6 | 10.0 | 600 | 0 | 0 | 30 | 60 | 90 | 120 | 150 | 70.0 | |
| Fig. 4e | 1โ6 | 5.6 | 700 | 0 | 0 | 30 | 60 | 90 | 120 | 150 | 77.3 | |
| 7โ12 | 5.6 | 308 | 0 | 0 | 30 | 60 | 90 | 120 | 150 | 77.3 | ||
| ED Fig. 9e,f | 1-6 | 11.1 | 615 | 0 | 0 | 30 | 60 | 90 | 120 | 150 | 76.7 | |
| Figure | i | A 1 (nm) | A 2 (nm) | ๐ฌ 1 (nm) | ๐ฌ 2 (nm) | ฯ 1 (deg) | ฯ 2 (deg) | ฮ (nm) | r1 (nm) | r2 (nm) | f(r,ฮธ) | |
| ED Fig. 7c | 1 | 35.0 | โ | 600 | โ | 180 | โ | 45 | 0 | โ | ||
| ED Fig. 7d | 1,2 | 17.5 | 17.5 | 600 | 600 | 180 | 0 | 45 | โ150 ลท | 150 ลท | ||
| Figure | A (nm) | L (nm) | ฮ (nm) | f(r) | ||||||||
| Fig. 2e | 35.0 | 1581 | 45.0 | |||||||||