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Concentration uniformity index RC under different TV and PV combinations.
|
RC |
|||
|---|---|---|---|
| 0.8 μm | 5 μm | 16 μm | |
| MV80 + P0 + E0 | 11.58 | 15.38 | 51.41 |
| MV66 + P7 + E7 | 6.66 | 9.24 | 55.88 |
| MV50 + P15 + E15 | 5.86 | 8.09 | 61.59 |
| DV80 + P0 + E0 | 41.75 | 33.99 | 45.43 |
| DV66 + P7 + E7 | 9.04 | 8.71 | 35.30 |
| DV50 + P15 + E15 | 7.68 | 7.95 | 33.26 |
| UFAD80 + P0 + E0 | 43.70 | 34.04 | 50.45 |
| UFAD66 + P7 + E7 | 8.85 | 7.89 | 31.11 |
| UFAD50 + P15 + E15 | 6.39 | 7.06 | 33.74 |
