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Comparison between TDMA-Hf, Zr and TEMA-Hf, Zr source specification
| Melting point (°C) | Temp (0.1Torr; °C) [17] | Temp (1Torr; °C) [17] | State (@canister temp; °C) | Vaporization type | Note | |
|---|---|---|---|---|---|---|
| TDMAH | 30 [17] | 48 | 75 | Liquid (70) | Vapor pressure | Fast exhaustion |
| TDMAZ | 60 [17] | 49 | 77 | Liquid (70) | Vapor pressure | Fast exhaustion |
| TEMAH | − 50 [27] | 83 | 113 | Liquid (50) | Bubbler | |
| TEMAZ | − 20 [28] | 76 | 106 | Liquid (50) | Bubbler |
