Skip to main content
. 2020 Mar 13;11(3):301. doi: 10.3390/mi11030301
MACE Metal-assisted chemical etching
ALD Atomic layer deposition
ED Electrodeposition
ELD Electroless deposition
EBL Electron beam lithography
DI Deionized
SEM Scanning electron microscopy
FIB Focused ion beam
OSA Order sorting aperture