| MACE | Metal-assisted chemical etching |
| ALD | Atomic layer deposition |
| ED | Electrodeposition |
| ELD | Electroless deposition |
| EBL | Electron beam lithography |
| DI | Deionized |
| SEM | Scanning electron microscopy |
| FIB | Focused ion beam |
| OSA | Order sorting aperture |
| MACE | Metal-assisted chemical etching |
| ALD | Atomic layer deposition |
| ED | Electrodeposition |
| ELD | Electroless deposition |
| EBL | Electron beam lithography |
| DI | Deionized |
| SEM | Scanning electron microscopy |
| FIB | Focused ion beam |
| OSA | Order sorting aperture |