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. 2016 Dec 29;29(11):1604606. doi: 10.1002/adma.201604606

Figure 1.

Figure 1

Unique features of chemical vapor deposition (CVD) polymers, and their applications in devices and device fabrication: a) schematic of a sensor; b) schematic of a 3D battery, the inset shows the TEM image of a silicon nanowire coated with ultrathin and conformal CVD polymer coating; Si nanowire arrays obtained from the group of Prof. C.V. Thompson at MIT; c) Crosss‐ectional TEM of an ultrathin (11 nm) iCVD dielectric between two aluminum electrodes forming a MIM device;17 d) schematic of photovoltaic structure with oCVD poly(3,4‐dimethyoxythiophene) (PDMT) integrated in the device;19 e) SEM image shows the sub‐10 nm patterns in silicon dioxide enabled by an iCVD top coating technique;41 and f) flexoprinting of electronic features on PET substrates, enabled by conformal CVD coating of a hydrophobic polymer onto arrays of patterned carbon nanotubes (CNTs). c) Reproduced with permission.17 Copyright 2015, Nature Publishing Group. d) Reproduced with permission.19 Copyright 2016, Wiley‐VCH.