Table 1.

Filters meeting target of 90% eff and below 30 Pa pressure drop.

# Layers/Modules	Module gsm	Total gsm	Df, nm	η (100 nm)	Δp, Pa
3	0.191	0.573	84	90%	30
8	0.096	0.77	349	90%	22.2
4	0.765	3.06	525	90%	18
3	0.87	2.61	450	90%	20
6	0.765	4.59	525	94%	26
4	0.87	3.48	450	93%	25