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Structural, electrical, and detection parameters for different deposition speeds.
| Deposition speed (mm s−1) | Grain size (µm2) | Thickness (nm) | Mobility (cm2 V−1 s−1) | NT (1012 eV−1 cm−2) | Sensitivity (µC Gy−1 cm−2) | Gain |
|---|---|---|---|---|---|---|
| Low (4) | 17 ± 3 | 70 ± 20 | (2.5 ± 0.7) · 10−2 | 1.7 ± 0.4 | (1.0 ± 0.2) · 102 | (7 ± 2) · 105 |
| Standard (10) | 6 ± 2 | 80 ± 20 | (1.7 ± 0.5) · 10−2 | 1.8 ± 0.5 | (3.8 ± 0.1) · 102 | (2.0 ± 0.6) · 106 |
| High (28) | 6 ± 3 | 120 ± 50 | (2.4 ± 0.6) · 10−2 | 1.6 ± 0.4 | (3.8 ± 1.2) · 102 | (4.0 ± 1.5) · 106 |
