U11	U22	U33	U12	U13	U23
S1	0.00989 (13)	0.01011 (14)	0.00894 (13)	0.00401 (11)	0.00008 (10)	0.00083 (10)
O1	0.0094 (4)	0.0174 (5)	0.0147 (4)	0.0047 (4)	0.0002 (3)	0.0018 (4)
O2	0.0193 (5)	0.0103 (4)	0.0128 (4)	0.0061 (4)	0.0007 (4)	−0.0004 (3)
O3	0.0168 (5)	0.0153 (5)	0.0105 (4)	0.0083 (4)	0.0033 (3)	0.0004 (3)
N1	0.0139 (5)	0.0110 (5)	0.0083 (4)	0.0060 (4)	0.0022 (4)	0.0010 (4)
N2	0.0203 (6)	0.0139 (5)	0.0094 (4)	0.0093 (5)	0.0019 (4)	−0.0013 (4)
C1	0.0105 (5)	0.0107 (5)	0.0082 (5)	0.0046 (4)	0.0002 (4)	0.0007 (4)
C2	0.0109 (5)	0.0109 (5)	0.0106 (5)	0.0054 (4)	0.0030 (4)	0.0023 (4)
C3	0.0139 (5)	0.0121 (6)	0.0094 (5)	0.0059 (5)	0.0025 (4)	0.0006 (4)
C4	0.0121 (5)	0.0128 (6)	0.0113 (5)	0.0035 (5)	−0.0001 (4)	0.0009 (4)
C5	0.0107 (5)	0.0176 (6)	0.0130 (5)	0.0073 (5)	0.0002 (4)	0.0008 (5)
C6	0.0115 (5)	0.0143 (6)	0.0107 (5)	0.0071 (5)	0.0010 (4)	0.0005 (4)
C7	0.0118 (5)	0.0181 (6)	0.0151 (5)	0.0086 (5)	0.0035 (5)	0.0016 (5)
C8	0.0167 (6)	0.0226 (7)	0.0134 (6)	0.0050 (6)	−0.0036 (5)	−0.0036 (5)
C9	0.0186 (6)	0.0309 (8)	0.0138 (6)	0.0172 (6)	0.0002 (5)	−0.0043 (5)
C10	0.0091 (5)	0.0112 (5)	0.0094 (5)	0.0045 (4)	−0.0012 (4)	−0.0005 (4)
C11	0.0100 (5)	0.0122 (6)	0.0094 (5)	0.0044 (4)	0.0004 (4)	0.0010 (4)
C12	0.0140 (6)	0.0125 (6)	0.0132 (5)	0.0059 (5)	0.0001 (4)	−0.0003 (4)
C13	0.0143 (6)	0.0119 (6)	0.0185 (6)	0.0041 (5)	0.0009 (5)	0.0038 (5)
C14	0.0135 (6)	0.0188 (7)	0.0149 (6)	0.0052 (5)	0.0024 (5)	0.0069 (5)
C15	0.0148 (6)	0.0207 (7)	0.0116 (5)	0.0079 (5)	0.0031 (5)	0.0020 (5)
C16	0.0114 (5)	0.0137 (6)	0.0108 (5)	0.0060 (5)	0.0003 (4)	0.0006 (4)
C17	0.0195 (6)	0.0167 (6)	0.0103 (5)	0.0104 (5)	0.0025 (5)	−0.0008 (4)