Table II.
TS | LS | ||||||||
---|---|---|---|---|---|---|---|---|---|
XMax =−1.5 [mm] | XMax =−0.5 [mm] | XMax =0 [mm] | |||||||
Spacing | σAvg [−] | ECoM [μm] | CI [−] | σAvg [−] | ECoM [μm] | CI [−] | σAvg [−] | ECoM [μm] | CI [−] |
1-off | 16.9 | 30.9 | 0.91 | 18.0 | 56.6 | 0.92 | 149.4 | 125.5 | 0.93 |
2-off | 27.6 | 26.2 | 0.96 | 27.4 | 31.5 | 0.94 | 151.7 | 112.7 | 0.92 |
3-off | 31.9 | 13.9 | 0.96 | 31.2 | 28.9 | 0.93 | 158.8 | 143.1 | 0.94 |
4-off | 37.0 | 17.0 | 0.96 | 32.8 | 27.8 | 0.94 | 150.2 | 105.5 | 0.94 |
5-off | 40.0 | 24.2 | 0.95 | 36.0 | 25.7 | 0.95 | 162.9 | 150.4 | 0.95 |
6-off | 35.6 | 23.1 | 0.96 | 36.0 | 35.0 | 0.93 | 156.5 | 94.0 | 0.95 |
Mean | 31.5 | 22.5 | 0.95 | 30.2 | 34.2 | 0.93 | 154.9 | 121.9 | 0.94 |
Std | 8.4 | 6.2 | 0.02 | 6.8 | 11.4 | 0.01 | 5.4 | 21.9 | 0.01 |