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Comparison of gas-sensing features of metal-oxide-based CO2 sensors.
| Material | Method | CO2 sensing response | Ts (°C) | Response time (s) | References |
|---|---|---|---|---|---|
| SnO2 on pSi | Precipitation | 19.0 | 300 | ~80 | Karthik et al., 2018 |
| ZnO on pSi | Precipitation | 9.0 | 300 | ~65 | Karthik et al., 2018 |
| HgSe-ZnO | Wet chemical method | 0.2 | 200 | – | Choi et al., 2019 |
| ITO | Evaporation | 1.8 | 200 | – | Patel et al., 2003 |
| NCD–ZnO–pSi | Precipitation/drop casting | 2.2 | 200 | 19 | This work |
