Skip to main content
. 2020 Apr 14;20(8):2206. doi: 10.3390/s20082206

Table 4.

First three modes (modes of interest).

Mode Number Modelled Frequency (KHz) Vibrometer Frequency (KHz) Vacuum Electrical Measurement (KHz) Vacuum Q-Factor in Vacuum Q-Factor in Air
1 23.8 22.98 21.40 646 49
2 42.1 42.70 42.79 366 222
3 43.0 43.10 43.32 366 222