Table 1.
Dielectric Materials | Thickness (nm) |
Ci (nF/cm2) |
k | Vth (V) | Ion/Ioff |
SS (V/decade) |
Ntrap (cm−2) |
---|---|---|---|---|---|---|---|
Sol–gel SiOx | 150 | 35.2 | 6 | −2.2 | ~103 | 1.5 | 5.32 × 1012 |
Improved Sol–gel SiOx | 150 | 48.5 | 8.2 | −2.3 | 1 × 105 | 0.8 | 3.76 × 1012 |
Improved Sol–gel SiOx/PVP | 170 | 40.3 | 7.8 | −1.7 | 5 × 105 | 0.4 | 1.44 × 1012 |