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. Author manuscript; available in PMC: 2021 Apr 1.
Published in final edited form as: IEEE Trans Ultrason Ferroelectr Freq Control. 2019 Nov 28;67(4):801–809. doi: 10.1109/TUFFC.2019.2956463

Fig. 3.

Fig. 3.

Evaluation of the PZT via (a) XRD, and (b) hysteresis loops. Measurements of (c) permittivity and (d) loss tangent of the thin film PZT for multiple elements on the PMUT device. Both permittivity and loss tangent showed less than 10% variation, for 20 different elements on the same die.