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. Author manuscript; available in PMC: 2021 Apr 1.
Published in final edited form as: IEEE Trans Ultrason Ferroelectr Freq Control. 2019 Nov 28;67(4):801–809. doi: 10.1109/TUFFC.2019.2956463

Fig. 5.

Fig. 5.

Pressure output for 12 different PMUT elements in the array at 7.5 mm from the PMUT surface, with each element containing 60 diaphragms excited using a 5 Vpp unipolar input. The inset shows the experimental setup, with the hydrophone ~7.5 mm distance away from the PMUT.