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. 2020 May 15;11:2407. doi: 10.1038/s41467-020-16269-7

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© The Author(s) 2020

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 3 — a Optical microscope image of the integrated displacement sensor. G stands for ground, S1 and S2 stand for signal of channel 1 and channel 2. b Photocurrent measured on a waveguide photodiode connected directly with a grating coupler at 1540 nm as a function of power on chip. Linear fit of the photocurrent with power under 100 µW is indicated by red line. Inset: Schematic of the integrated photodiode. Red arrow marks the direction of incoming light. c SEM image of the integrated photodiode in false colors.