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Thickness of intermixing, bulk, and surface layers comprising the multi-layer structure of a-C film with 48% sp3 overall content obtained after annealing versus annealing temperature.
| Annealing temperature (°C) | Thickness (Å) | ||
|---|---|---|---|
| Intermixing layer | Bulk layer | Surface layer | |
| 150 | 12 | 13 | 4 |
| 200 | 12 | 13 | 4 |
| 250 | 12 | 13 | 5 |
| 300 | 12 | 12 | 5 |
| 350 | 12 | 12 | 6 |
| 450 | 12 | 12 | 6 |
