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. 2020 Apr 10;11(4):397. doi: 10.3390/mi11040397

Figure 4.

Figure 4

Selected examples of published deposit shapes and methods to determine the elastic modulus. The force F acting on the structure is indicated in all images. (a) Bulk FEBID square deposit for nanoindentation, modified from Ding et al. [45]. (b) FEBID pillar bending by commercial silicon cantilever, modified from Okada et al. [36]. (c) FIB pillar bending by another FIB pillar with known spring constant, modified from Guo et al. [37]. (d) FIB pillar vibration method combined with density determination, modified from Kometani et al. [38]. (e) Tensile strain experiment with horizontal FIB rods on a comb drive stage, modified from Kiuchi et al. [39]. (f) Compression of a thick FIB cube with 3.5 μm × 3.5 μm base area, modified from Kim et al. [41]. (g) Thermal noise vibration method at the very end of a 21.7 μm long FIB pillar. The inset shows the related fuzzy secondary electron signal, modified from Nonaka et al. [42]. (h) Tensile strain experiment with FIB helix fixed between a cantilever and gold glass capillary, modified from Nakamatsu et al. [43]. The organic precursors used were paraffin (a) and phenanthrene (b) to (h).