Figure 9.

Selected overview of published methods for the density determination of nanostructures grown by FEBID and FIBID. (a–c) Pt-C FEBID pillar vibration with electric AC excitation inside a TEM. The first (a and b) and second fundamental resonances (c) can be seen. Note the large amplitude that the pillar can withstand as well as the diameter Ø variations. Modified from Hao et al. [90]. (d) SEM tilt view of an electrostatically AC excited Pt-C FEBID pillar vibration with integrated electrode design, modified from Arnold et al. [47]. (e) FEBID Pt-C bridge, which monitors vibrations in situ via the current read out shown in (f) modified from Arnold et al. [47]. (g) SEM tilt view of a laterally FIB grown pillar from W(CO)₆ with integrated electrode. The inset shows the fundamental resonance. Modified from Cordoba et al. [51]. (h) Destructive mass measurements of FEBID pillars grown on a cantilever. Modified from Utke et al. [55]. (i) In situ mass measurement of a Pt-FIBID deposit deposited on an SEM integrated cantilever with piezoresistive frequency readout. Modified from Friedli et al. [46]. (j) Mass measurement of Ga-FIB grown carbon structure. The cantilever frequency was measured before and after the deposition. Modified from Kometani et al. [38].