Skip to main content
. 2020 Apr 10;11(4):397. doi: 10.3390/mi11040397

Figure 18.

Figure 18

Reported nanoindentation hardness values for FEBID and FIBID material. The characterization method, beam acceleration voltage, and beam current are reported together with the metal content. Metal contents are given in at.%. Hardness ranges for the metals and amorphous hydrogenated carbon are also indicated.