Figure 22.

Summary of density measurements of FEBID and FIBID (noted as FEB and FIB) grown materials. The vertical axis lists the precursor molecule used to grow the structure and the author reference; if not noted otherwise, the density is reported for as-grown material. Maximum and minimum densities as far as accessible, the metal contents, and the measurement methods are indicated. Metal contents given in parentheses were interpolated in the respective reference but not explicitly measured. The measurement methods are pillar vibration (PV), cantilever-based (Cant.), and thermal noise (Th. Noise). Bulk density values of pure compounds and elements are also indicated. The density ratios of deposit to bulk are noted in green for the maximum deposit density.