Figure 2.
Microfabrication process flow for the fabrication of the single-layer microfluidic device. (A) DRIE etch of Si wafer. (B) PDMS casting over Si stamp. (C) Microfluidic device assembly on glass slide.
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.