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. 2020 Apr 10;11(4):395. doi: 10.3390/mi11040395

Figure 5.

Figure 5

Brightfield images of silicon micromachined mold (A,B) and PDMS single layer valve under different actuation pressures (C,D). (A) Brightfield image of micromachined silicon stamp for soft lithography. (B) 100x magnification of the corner of our structural element. As it can be observed the side opening measures ~0.5 μm. (C) Brightfield image of our microfluidic valve in the rest state. (D) Brightfield image of our microfluidic valve actuated at a negative pressure of 0.5 atm. (E) Brightfield image of our microfluidic valve actuated with a positive pressure of 1 atm.