Table 1.

Dimensions of the micro-nozzles integrated with indium tin oxide (ITO) micropumps and electrodes.

Category	Parts	Dimension
Flow channel	Height, H	71.9 ± 1.41 μm (N = 16)
	Width of flow channel in electrode section, B	189.1 ± 4.57 μm (N = 10)
	Width of the narrower flow channel, A	62.0 ± 2.30 μm (N = 16)
ITO electrodes	Width, C	65.7 ± 0.91 μm (N = 5)
	Gap between a pair of electrodes, g	23.3 ± 1.81 μm (N = 5)
	Pitch, p	191.0 ± 1.11 μm (N = 5).
Pt/Ti electrodes	Width, C	67.8 ± 0.91 μm (N = 5)
	Gap between a pair of electrodes, g	24.5 ± 1.44 μm (N = 5)
	Pitch, p	192.7 ± 1.12 μm (N = 5)