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| dielectric | Ci (nF/cm2) | Vth (V) | Ion/Ioff | SS (V/decade) | Ntrapmax (cm–2 eV–1) | average mobility (cm2/V·s) |
|---|---|---|---|---|---|---|
| SiO2 | 11.4 | –45.6 ± 4.8 | >107 | 3.9 ± 0.3 | (4.6 ± 0.4) × 1012 | 1.85 ± 0.68 |
| PMMA/SiO2 | 10.0 | –40.5 ± 4.2 | >107 | 3.8 ± 0.2 | (4.5 ± 0.2) × 1012 | 2.24 ± 0.75 |
| PS/SiO2 | 11.3 | –41.2 ± 3.5 | >107 | 3.4 ± 0.2 | (3.7 ± 0.2) × 1012 | 3.16 ± 1.24 |
