Table 1.
Results of coarse alignment.
| Times | 1 | 2 | 3 | |||
|---|---|---|---|---|---|---|
| Direction | X | Y | X | Y | X | Y |
| Deviation (mm) | −0.395 | 0.335 | −0.193 | 0.328 | 0.305 | 0.344 |
| Angle (degree) | −0.226 | 0.192 | −0.110 | 0.188 | 0.175 | 0.197 |
| Alignment time (s) | 30 | |||||
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