Table 2.
Electrical properties of thin films deposited at different working pressures.
| Pressure (Pa) | σ (Ω−1·cm−1) | μ (cm2/Vs) | n (1015·cm−3) |
|---|---|---|---|
| 0.21 | 11.25 | 89.64 | 783 |
| 0.61 | 6.20 | 135.10 | 286 |
| 0.83 | 2.76 | 228.90 | 75 |
Official websites use .gov
A
.gov website belongs to an official
government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you've safely
connected to the .gov website. Share sensitive
information only on official, secure websites.