| AES | Auger electron spectroscopy |
| EDX | energy dispersive X-ray spectroscopy |
| FIB | focussed ion beam |
| HV | high vacuum |
| ML | multilayer |
| SAW | surface acoustic wave |
| SEM | scanning electron microscopy |
| STEM | scanning electron transmission microscopy |
| XPS | X-ray photoelectron spectroscopy |
| XRD | X-ray diffraction |
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