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. 2020 Jun 2;5:45. doi: 10.1038/s41541-020-0195-4

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© The Author(s) 2020

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — a Spray-dried, uncoated particles imaged by SEM show a narrow particle size distribution and surface dimpling characteristics that were optimized by adjusting formulations to aid with fluidization during ALD. b Particles coated with 250 coats of alumina show no significant change in single particle morphology. c TEM image of particles with 250 ALD-alumina coats. Measurements confirm the value of 2.3 Å/ALD cycle as measured by ellipsometry. d Measurements using SEM after FIB milling of a particle coated with 250 coats of alumina confirm the value of 2.3 Å/ALD cycle.