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. Author manuscript; available in PMC: 2020 Dec 1.
Published in final edited form as: IEEE Sens J. 2019 Aug 15;19(23):11242–11246. doi: 10.1109/jsen.2019.2935689

Fig. 6.

Fig. 6.

Pressure-induced cavity length change of the pressure sensor. Insets: Cavity length change with respect to the pressure change in the range of 0 to 160 kPa, 180–340 kPa and 360 to 500 kPa, respectively.