Table 2.

The FoMs of 1D resonant scanning MEMS mirrors.

Marker	Actuation Method	FoM	Mirror Plate Dimensions	Resonant Angle θ0		Resonant Frequency f0 (kHz)	Q	Ref.
				(°)	(rad)
•	EM	2.79	D = 12 mm	26	0.45	1.24	253	[56]
▼	EM	1.16	28.2 mm2	62	1.08	0.19	12	[62]
▲	EM	0.44	D = 2 mm	30	0.52	0.55	20 *	[63]
■	ES	7.79	D = 0.8 mm	80	1.40	30.8	26800	[60]
▲	ES	6.48	D = 1.0 mm	45	0.79	38.5	49300	[60]
+	ES	3.38	D = 0.55 mm	25	0.44	34	273	[64]
•	ES	3.33	Ellipsoid, 2 mm × 4 mm2	180	3.14	1.5	10,000 *	[65]
♦	ES	2.36	D = 0.8 mm	58	1.01	4.4	50	[66]
•	ET	2.72	0.7 × 0.32 mm2	170	2.97	2.4	25	[61]

* The Q are estimated from similar designs. EM: Electromagnetic. ES: Electrostatic. ET: Electrothermal. PE: Piezoelectric. D: Diameter.