Table 4.

The FoM of 2D double resonant scanning MEMS mirrors.

Marker	Actuation Method	FoM	Mirror Plate Dimension	Resonant Angle θh		Resonant Angle θv		fh (kHz)	fv (kHz)	β	Ref.
				(°)	(rad)	(°)	(rad)
♦	EM	0.97	D = 1.5 mm	65	1.13	53	0.92	0.4	21.3	4.60 *	[80]
|	EM	0.61	D = 6.5 mm	18	0.31	30	0.53	0.674	1.87	4.88	[81]
+	EM	0.41	D = 1 mm	28	0.48	40	0.70	0.56	25	5.29	[82]
×	EM	0.32	2.6 × 3.6 mm2	26	0.45	24	0.42	1.4	0.39	3.45	[83]
★	EM	0.32	8 × 8 mm2	90	1.57	50	0.87	0.06	0.06	2.00	[84]
•	ES	0.62	D = 7 mm	26	0.45	26	0.45	1.57	1.57	8.01	[78]
▲	ES	0.48	D = 1 mm	44	0.77	24	0.42	26	1.4	7.00 *	[85]
■	ES	0.47	D = 1 mm	60	1.05	70	1.22	17.8	0.5	7.30 *	[60]
★	ES	0.46	1 × 1.1 mm2	45	0.79	30	0.52	10.3	1.9	7.30 *	[86]
×	ES	0.37	D = 1 mm	40	0.70	30	0.52	22	1.4	7.30	[85]
▼	ES	0.34	D = 1 mm	30	0.52	30	0.52	18	1.5	9.94	[87]
♦	ES	0.31	0.2 × 0.2 mm2	27	0.47	27	0.47	5.9	5.9	2.00	[88]
+	ES	0.06	D = 1 mm	18	0.31	10	0.17	1	1	4.00 *	[89]
▲	ET	0.08	D = 1 mm	16	0.28	10	0.17	1.19	1.18	3.18	[90]
•	ET+EM	0.01	2 × 1 mm2	10	0.17	3	0.05	0.2	0.07	2.00 *	[91]
■	PE	0.51	D = 1 mm	21	0.37	31	0.55	23.9	1.5	5.26 *	[87]
•	PE	0.34	2 × 2 mm2	28	0.48	40	0.70	25	0.56	5.60	[92]
▼	PE	0.33	1 × 1 mm2	42	0.73	40	0.70	1.46	0.95	7.40	[93]
▲	PE	0.28	4 × 7.4 mm2, corner shape	26	0.45	23	0.40	0.46	0.22	2.93	[94]
★	PE	0.02	1.1 × 1.1 mm2	5	0.09	5	0.09	0.58	0.58	2.60	[95]

* The Q are estimated from similar designs.