Table 1.
Details of microelectrode array (MEA) batches.
| MEA Batch | 1 | 2 | 3 | 4 |
|---|---|---|---|---|
| ITO thickness (nm) | 20 | 20 | 150 | 180 |
| ITO deposition method | IBAD | IBAD | IBAD | Sputtering |
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