Table 1.

Summary of metamaterial microbolometer design properties.

VO2 substrate dimensions	52 × 52 × 0.20 mm3
Metasurface envelope	50 × 0.027 μm3
Maximum Absorption	99.94%
Ti electrode dimensions (2)	46.0 × 1.0 × 0.25 μm3
Resistance, R	100 kΩ
Bias Current, Ib	5 μA
Temperature Rise, Δ$T_{I_b}$	4.0 K
TCR, β	0.03 1/K
Thermal Conductance, Gth	2.45 × 10−7 W/K
Thermal Capacitance, Cth	1.34 × 10−9 J/K
Thermal Time Constant, τth	5.3 ms
Maximum Responsivity, Rv	24.7 × 103 V/W @ 60 Hz
Maximum Detectivity, D*	1.5 × 109 cm$\sqrt{\text{Hz}}$/W @ 60 Hz