Table 1.
Parameter | Value |
---|---|
Side length of the square resonator | L = 1400 µm |
Thickness of the square resonator | h = 10 µm |
Mass of the resonator array | marray = 91.336 µg |
Stiffness of the resonator array | karray = 14.61 MN/m |
Thickness of the AlN film | hAlN = 500 nm |
Thickness of the Al film | hAl = 1 μm |
Unloaded Q of the resonator array | Qarray = 1773.8 (out-of-phase) |