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. 2020 Jun 2;20(11):3162. doi: 10.3390/s20113162

Table 1.

Dimensions of the weakly coupled MEMS resonators.

Parameter Value
Side length of the square resonator L = 1400 µm
Thickness of the square resonator h = 10 µm
Mass of the resonator array marray = 91.336 µg
Stiffness of the resonator array karray = 14.61 MN/m
Thickness of the AlN film hAlN = 500 nm
Thickness of the Al film hAl = 1 μm
Unloaded Q of the resonator array Qarray = 1773.8 (out-of-phase)