Fig. 4. MEMS movable switch and the corresponding electrical performances.

a Schematic of the movable switch. b Scanning electron microscope (SEM) image of the switch. c Calculated dynamic breakdown voltage as functions of the anode displacement (x) and the relation between the voltage applied to the anode $V_{C_{\mathrm{buf}}}$ and x (blue curve). d Static calculated breakdown voltage versus gap g₀ with anode displacement of x = 0.02 μm, which corresponds to the section of x = 0.02 μm in c. Voltage across C_buf and C_store and the regulator output (blue) when using a movable switch with gap 6 μm (e), and 9 μm (f) in the 2-stage system with a commercial regulator and a load of 660 kΩ. g The switch ON and OFF voltages versus the Paschen’s law curve of silicon electrodes. Source data are provided as a Source data file.