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. 2020 Jul 2;10:10901. doi: 10.1038/s41598-020-67803-y

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© The Author(s) 2020

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Overview of experiments to unravel the chemistry that underlies the electron-induced formation of deposits from the Ru precursor (η³-C₃H₅)Ru(CO)₃Cl and the NH₃-assisted purification process aiming at removal of Cl from the deposits. (a) Structure of the precursor and colour scheme of the relevant elements. Deposits were produced by (b) electron-stimulated desorption (ESD) from thin condensed layers of (η³-C₃H₅)Ru(CO)₃Cl on Ta held at 110 K and (c) subsequent thermal desorption spectrometry (TDS) during which the sample was annealed to 450 K at a rate of 1 K/s. The deposit was used in the subsequent purification experiments consisting of several cycles in each of which (d) NH₃ was condensed onto the deposit at 110 K, followed by (e) an ESD and (f) a TDS experiment. Desorption of volatile species was monitored in all experiments by mass spectrometry (MS).