Figure 6.

Auger electron spectra (AES) recorded on a deposit prepared by electron exposure (1.25·10¹⁷ e⁻/cm²) at E₀ = 31 eV and subsequent annealing to 450 K of an adsorbed layer of (η³-C₃H₅)Ru(CO)₃Cl on Ta before (bottom) and after an increasing number of purification cycles (from bottom to top) (a) in the presence of NH₃ and (b) without NH₃. Each purification cycle comprised an electron exposure of 1.25·10¹⁶ e⁻/cm² followed by annealing to 450 K. (c) Relative amounts of Cl and Ru after increasing numbers of purification cycles performed on the deposit in presence of NH₃ (blue) and on the deposit only (black). These values were determined from the peak-to-peak intensities of the Cl signal at 184 eV and the Ru signal at 235 eV by accounting for the respective sensitivity factors for 5 keV impinging electrons [0.6941 for Ru (235 eV) and 8.1285 for Cl (184 eV)²⁸].