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. 2020 Jul 3;11:3291. doi: 10.1038/s41467-020-16987-y

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© The Author(s) 2020

Open Access This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons license, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons license, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons license and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this license, visit http://creativecommons.org/licenses/by/4.0/.

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Fig. 1 — Scanning electron microscopy images of the superconducting Nb-C-FIBID microstrip before (a) (the scale bar is 300 nm) and after (b) (the scale bar is 1 μm) covering it with an insulating Nb-C-FEBID layer shown by the green false color. The current and voltage leads are indicated with I⁺, I⁻, V⁺, and V⁻. c Atomic force microscopy image of a part of the fabricated structure. The scale bar is 1 μm.