Table 1.
Summary of studies on the laser digital patterning process using metal oxide nanomaterials
| Metal oxide | Solvent for NP ink | Laser | Substrate | Electrical properties | Transmittance @ 550 nm | Refs. |
|---|---|---|---|---|---|---|
| ITO | Ethanol | ns, 248 nm | PET | ρ = 1.1 × 10−2 Ω cm | 66% | [30] |
| ITO | Ethanol | cw, 10.6 µm | PET | Rs ~ 400 Ω sq−1 (ρ = 12 × 10−2 Ω cm) | 80% | [32] |
| ITO | Alcoholic solvent | ps, 1.75 µm | PET | Rs ~ 300 Ω sq−1 | 80% | [33] |
| ITO | Commercial suspension | cw, 1.5 µm | Glass | Rs ~ 80 Ω sq−1 (ρ = 1.3 × 10−3 Ω cm) | 75% | [29] |
| ZnO | Ethanol, Ethylene glycol | ns, 248 nm | SiO2 | R = 3.4 × 104 MΩ → 78 MΩ | – | [42] |
| ZnO | 1-pentanol | ps, 355 nm | Quartz | Rs ~ 5 kΩ sq−1 (ρ = 4.75 × 10−2 Ω cm) | 84% | [44] |
| ZnO | Methanol, Butyl acetate | cw, 1065 nm | Glass, Na-CMC | ρ = 0.9 × 10−4 Ω cm | – | [55] |
| CuO | Ethylene glycol | cw & ns 1070 nm | Glass, PI | ρ = 31 × 10−6 Ω cm | – | [77] |
| CuO | IPA | ns, 1070 nm | Glass | ρ = 13 × 10−6 Ω cm | – | [78] |
| CuO | Ethylene glycol | ns, 1070 nm | PET | ρ = 30 × 10−6 Ω cm | – | [81] |
| CuO/NiO | Ethylene glycol | fs, 780 nm | Glass | – | – | [83] |
| CuO/GO | Water | cw, 405 nm | PET | Rs = 19.6 Ω sq−1 | – | [84] |
| CuxO | Isopropyl alcohol, Ethylene glycol | cw, 532 nm | Glass | R = over 10 000 Ω → 91 Ω | – | [85] |
| NiOx | Toluene | cw, 514.5 nm | Glass, PI | Rs = 655 Ω sq−1 (ρ = 63 × 10−6 Ω cm) | 87% | [105] |
| NiOx | Toluene | cw, 532 nm | Glass | ρ = 103 × 10−6 Ω cm | – | [108] |
| NiOx | 1-pentanol | cw, 532 nm | Glass, PI, PET | Rs = 53 Ω sq−1 (ρ = 98.8 × 10−6 Ω cm) | 84% | [20] |
| NiOx | 1-pentanol | cw, 532 nm | PET | – | – | [109] |
| NiO/Cr | Ethylene glycol | fs, 780 nm | Glass | ρ = 290 Ω cm | [110] |
ρ resistivity, Rs sheet resistance, R resistance, ns nanosecond, cw continuous-wave, ps picosecond, fs femtosecond