Figure 2.

Sheet membrane fabrication process. (a) Assembled device halves ready for membrane transfer. (b) Loading three ~ 1″ × 1″ samples of nanoporous silicon nitride membrane wafers prior to release etch. (c) Etching using a Xactix^® E2 tool allows for transfer from the silicon wafer portions to the device frames. (d) Separating the mesh and sheet membranes from wafer samples. (e) Vacuum chuck inverted for transfer onto acrylic. (f) Devices applied to sheet membranes. (g) Device ready for leak check and sealing.