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The first four order modes of dual-mass sensing mode-coupling micro-electro-mechanical system (MEMS) gyroscope structure: (a) drive in phase mode (first mode) with frequency ωx1 = 2623 × 2π rad/s; (b) sensing in phase mode (second mode) with frequency ωy1 = 3342 × 2π rad/s; (c) sensing anti-phase mode (third mode) with frequency ωy2 = 3468 × 2π rad/s; and (d) drive anti-phase mode (fourth mode) with frequency ωx2 = 3484 × 2π rad/s.
