Original Texts	Acronyms and Abbreviations
Awl-shaped serpentine microspring	ASSM
Micro-electro-mechanical system	MEMS
Silicon-on-insulator	SOI
Plasma enhanced chemical vapor deposition	PECVD
Reactive ion etching	RIE
Hydrofluoric acid	HF
Scanning electron microscope	SEM
Charge coupled device	CCD
Microforce Testing System	MTS